Content
Wafer Edge Crack Inspect System
Product Overview
System for inspecting various defects (including crack, scratch, particle, etc.) on wafer edge using a vision module
Specification
| Category | Spec |
|---|---|
Defect Size |
W @ 100um / L @ 1,200um |
Scan |
Line scan camera (12K) |
Lighting |
LED |
Inspect Method |
Contrast calculation with background normalization |
Application
-
Intended UseVisual inspection for wafer edge -
Major TechnologyOptical design, Vision technology -
Extended ApplicationVision System
Certification
Online Inquiry
Press Release